JPS4926748A - - Google Patents

Info

Publication number
JPS4926748A
JPS4926748A JP6757272A JP6757272A JPS4926748A JP S4926748 A JPS4926748 A JP S4926748A JP 6757272 A JP6757272 A JP 6757272A JP 6757272 A JP6757272 A JP 6757272A JP S4926748 A JPS4926748 A JP S4926748A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6757272A
Other languages
Japanese (ja)
Other versions
JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6757272A priority Critical patent/JPS5525486B2/ja
Publication of JPS4926748A publication Critical patent/JPS4926748A/ja
Publication of JPS5525486B2 publication Critical patent/JPS5525486B2/ja
Expired legal-status Critical Current

Links

JP6757272A 1972-07-07 1972-07-07 Expired JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Publications (2)

Publication Number Publication Date
JPS4926748A true JPS4926748A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-09
JPS5525486B2 JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-07

Family

ID=13348787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6757272A Expired JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-07 1972-07-07

Country Status (1)

Country Link
JP (1) JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148551U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-05-29 1975-12-10
JPS62198119A (ja) * 1986-02-25 1987-09-01 Morita Mfg Co Ltd 硼素拡散方法並びにその装置
JPH01169924A (ja) * 1986-10-29 1989-07-05 Mitel Corp 不純物拡散方法
JPH0277118A (ja) * 1988-09-13 1990-03-16 Shin Etsu Handotai Co Ltd 半導体ウェーハへの硼素拡散方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551109U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-09-29 1980-04-04

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4029370Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1963-10-30 1965-10-13
JPS4111901Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-03-19 1966-06-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4029370Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1963-10-30 1965-10-13
JPS4111901Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-03-19 1966-06-03

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148551U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-05-29 1975-12-10
JPS62198119A (ja) * 1986-02-25 1987-09-01 Morita Mfg Co Ltd 硼素拡散方法並びにその装置
JPH01169924A (ja) * 1986-10-29 1989-07-05 Mitel Corp 不純物拡散方法
JPH0277118A (ja) * 1988-09-13 1990-03-16 Shin Etsu Handotai Co Ltd 半導体ウェーハへの硼素拡散方法

Also Published As

Publication number Publication date
JPS5525486B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-07

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