JPS4926182A - - Google Patents

Info

Publication number
JPS4926182A
JPS4926182A JP6723272A JP6723272A JPS4926182A JP S4926182 A JPS4926182 A JP S4926182A JP 6723272 A JP6723272 A JP 6723272A JP 6723272 A JP6723272 A JP 6723272A JP S4926182 A JPS4926182 A JP S4926182A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6723272A
Other languages
Japanese (ja)
Other versions
JPS5120356B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47067232A priority Critical patent/JPS5120356B2/ja
Publication of JPS4926182A publication Critical patent/JPS4926182A/ja
Publication of JPS5120356B2 publication Critical patent/JPS5120356B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP47067232A 1972-07-04 1972-07-04 Expired JPS5120356B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47067232A JPS5120356B2 (enrdf_load_stackoverflow) 1972-07-04 1972-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47067232A JPS5120356B2 (enrdf_load_stackoverflow) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
JPS4926182A true JPS4926182A (enrdf_load_stackoverflow) 1974-03-08
JPS5120356B2 JPS5120356B2 (enrdf_load_stackoverflow) 1976-06-24

Family

ID=13338948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47067232A Expired JPS5120356B2 (enrdf_load_stackoverflow) 1972-07-04 1972-07-04

Country Status (1)

Country Link
JP (1) JPS5120356B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134986A (enrdf_load_stackoverflow) * 1974-04-16 1975-10-25
JPH03232963A (ja) * 1990-02-08 1991-10-16 Nippon Steel Corp セラミックス膜被覆方法
US8747558B2 (en) 2003-02-14 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134986A (enrdf_load_stackoverflow) * 1974-04-16 1975-10-25
JPH03232963A (ja) * 1990-02-08 1991-10-16 Nippon Steel Corp セラミックス膜被覆方法
US8747558B2 (en) 2003-02-14 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus

Also Published As

Publication number Publication date
JPS5120356B2 (enrdf_load_stackoverflow) 1976-06-24

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