JPS4926182A - - Google Patents
Info
- Publication number
- JPS4926182A JPS4926182A JP6723272A JP6723272A JPS4926182A JP S4926182 A JPS4926182 A JP S4926182A JP 6723272 A JP6723272 A JP 6723272A JP 6723272 A JP6723272 A JP 6723272A JP S4926182 A JPS4926182 A JP S4926182A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067232A JPS5120356B2 (da) | 1972-07-04 | 1972-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067232A JPS5120356B2 (da) | 1972-07-04 | 1972-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4926182A true JPS4926182A (da) | 1974-03-08 |
| JPS5120356B2 JPS5120356B2 (da) | 1976-06-24 |
Family
ID=13338948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47067232A Expired JPS5120356B2 (da) | 1972-07-04 | 1972-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120356B2 (da) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134986A (da) * | 1974-04-16 | 1975-10-25 | ||
| JPH03232963A (ja) * | 1990-02-08 | 1991-10-16 | Nippon Steel Corp | セラミックス膜被覆方法 |
| US8747558B2 (en) | 2003-02-14 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
-
1972
- 1972-07-04 JP JP47067232A patent/JPS5120356B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134986A (da) * | 1974-04-16 | 1975-10-25 | ||
| JPS5315837B2 (da) * | 1974-04-16 | 1978-05-27 | ||
| JPH03232963A (ja) * | 1990-02-08 | 1991-10-16 | Nippon Steel Corp | セラミックス膜被覆方法 |
| US8747558B2 (en) | 2003-02-14 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5120356B2 (da) | 1976-06-24 |