JPS4926182A - - Google Patents

Info

Publication number
JPS4926182A
JPS4926182A JP6723272A JP6723272A JPS4926182A JP S4926182 A JPS4926182 A JP S4926182A JP 6723272 A JP6723272 A JP 6723272A JP 6723272 A JP6723272 A JP 6723272A JP S4926182 A JPS4926182 A JP S4926182A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6723272A
Other languages
Japanese (ja)
Other versions
JPS5120356B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47067232A priority Critical patent/JPS5120356B2/ja
Publication of JPS4926182A publication Critical patent/JPS4926182A/ja
Publication of JPS5120356B2 publication Critical patent/JPS5120356B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP47067232A 1972-07-04 1972-07-04 Expired JPS5120356B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47067232A JPS5120356B2 (cs) 1972-07-04 1972-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47067232A JPS5120356B2 (cs) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
JPS4926182A true JPS4926182A (cs) 1974-03-08
JPS5120356B2 JPS5120356B2 (cs) 1976-06-24

Family

ID=13338948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47067232A Expired JPS5120356B2 (cs) 1972-07-04 1972-07-04

Country Status (1)

Country Link
JP (1) JPS5120356B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134986A (cs) * 1974-04-16 1975-10-25
JPH03232963A (ja) * 1990-02-08 1991-10-16 Nippon Steel Corp セラミックス膜被覆方法
US8747558B2 (en) 2003-02-14 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134986A (cs) * 1974-04-16 1975-10-25
JPS5315837B2 (cs) * 1974-04-16 1978-05-27
JPH03232963A (ja) * 1990-02-08 1991-10-16 Nippon Steel Corp セラミックス膜被覆方法
US8747558B2 (en) 2003-02-14 2014-06-10 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus

Also Published As

Publication number Publication date
JPS5120356B2 (cs) 1976-06-24

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