JPS4925223B1 - - Google Patents

Info

Publication number
JPS4925223B1
JPS4925223B1 JP900569A JP900569A JPS4925223B1 JP S4925223 B1 JPS4925223 B1 JP S4925223B1 JP 900569 A JP900569 A JP 900569A JP 900569 A JP900569 A JP 900569A JP S4925223 B1 JPS4925223 B1 JP S4925223B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP900569A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP900569A priority Critical patent/JPS4925223B1/ja
Priority to GB618470A priority patent/GB1286598A/en
Priority to US00226546A priority patent/US3843227A/en
Publication of JPS4925223B1 publication Critical patent/JPS4925223B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP900569A 1969-02-08 1969-02-08 Pending JPS4925223B1 (xx)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP900569A JPS4925223B1 (xx) 1969-02-08 1969-02-08
GB618470A GB1286598A (en) 1969-02-08 1970-02-09 Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method
US00226546A US3843227A (en) 1969-02-08 1972-02-15 Light dissecting optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP900569A JPS4925223B1 (xx) 1969-02-08 1969-02-08

Publications (1)

Publication Number Publication Date
JPS4925223B1 true JPS4925223B1 (xx) 1974-06-28

Family

ID=11708526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP900569A Pending JPS4925223B1 (xx) 1969-02-08 1969-02-08

Country Status (2)

Country Link
JP (1) JPS4925223B1 (xx)
GB (1) GB1286598A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5484852U (xx) * 1977-11-28 1979-06-15
JP2012515331A (ja) * 2009-01-13 2012-07-05 セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド ウェーハを検査するためのシステム及び方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2299624A1 (fr) * 1974-09-26 1976-08-27 Anvar Procede et dispositif pour la determination des etats de surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5484852U (xx) * 1977-11-28 1979-06-15
JP2012515331A (ja) * 2009-01-13 2012-07-05 セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド ウェーハを検査するためのシステム及び方法
JP2014016358A (ja) * 2009-01-13 2014-01-30 Semiconductor Technologies & Instruments Pte Ltd ウェーハを検査するためのシステム及び方法

Also Published As

Publication number Publication date
GB1286598A (en) 1972-08-23

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