JPS4925223B1 - - Google Patents
Info
- Publication number
- JPS4925223B1 JPS4925223B1 JP900569A JP900569A JPS4925223B1 JP S4925223 B1 JPS4925223 B1 JP S4925223B1 JP 900569 A JP900569 A JP 900569A JP 900569 A JP900569 A JP 900569A JP S4925223 B1 JPS4925223 B1 JP S4925223B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP900569A JPS4925223B1 (he) | 1969-02-08 | 1969-02-08 | |
GB618470A GB1286598A (en) | 1969-02-08 | 1970-02-09 | Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method |
US00226546A US3843227A (en) | 1969-02-08 | 1972-02-15 | Light dissecting optical system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP900569A JPS4925223B1 (he) | 1969-02-08 | 1969-02-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4925223B1 true JPS4925223B1 (he) | 1974-06-28 |
Family
ID=11708526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP900569A Pending JPS4925223B1 (he) | 1969-02-08 | 1969-02-08 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS4925223B1 (he) |
GB (1) | GB1286598A (he) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5484852U (he) * | 1977-11-28 | 1979-06-15 | ||
JP2012515331A (ja) * | 2009-01-13 | 2012-07-05 | セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド | ウェーハを検査するためのシステム及び方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2299624A1 (fr) * | 1974-09-26 | 1976-08-27 | Anvar | Procede et dispositif pour la determination des etats de surface |
-
1969
- 1969-02-08 JP JP900569A patent/JPS4925223B1/ja active Pending
-
1970
- 1970-02-09 GB GB618470A patent/GB1286598A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5484852U (he) * | 1977-11-28 | 1979-06-15 | ||
JP2012515331A (ja) * | 2009-01-13 | 2012-07-05 | セミコンダクター テクノロジーズ アンド インストゥルメンツ ピーティーイー リミテッド | ウェーハを検査するためのシステム及び方法 |
JP2014016358A (ja) * | 2009-01-13 | 2014-01-30 | Semiconductor Technologies & Instruments Pte Ltd | ウェーハを検査するためのシステム及び方法 |
Also Published As
Publication number | Publication date |
---|---|
GB1286598A (en) | 1972-08-23 |