JPS4922679U - - Google Patents
Info
- Publication number
- JPS4922679U JPS4922679U JP6205072U JP6205072U JPS4922679U JP S4922679 U JPS4922679 U JP S4922679U JP 6205072 U JP6205072 U JP 6205072U JP 6205072 U JP6205072 U JP 6205072U JP S4922679 U JPS4922679 U JP S4922679U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205072U JPS5218530Y2 (de) | 1972-05-29 | 1972-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205072U JPS5218530Y2 (de) | 1972-05-29 | 1972-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922679U true JPS4922679U (de) | 1974-02-26 |
| JPS5218530Y2 JPS5218530Y2 (de) | 1977-04-26 |
Family
ID=27951983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6205072U Expired JPS5218530Y2 (de) | 1972-05-29 | 1972-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5218530Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61228648A (ja) * | 1985-01-22 | 1986-10-11 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウェハ製造装置、半導体ウェハ処理装置及びチャック装置 |
-
1972
- 1972-05-29 JP JP6205072U patent/JPS5218530Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61228648A (ja) * | 1985-01-22 | 1986-10-11 | アプライド マテリアルズ インコ−ポレ−テツド | 半導体ウェハ製造装置、半導体ウェハ処理装置及びチャック装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5218530Y2 (de) | 1977-04-26 |