JPS4921796A - - Google Patents
Info
- Publication number
- JPS4921796A JPS4921796A JP47062416A JP6241672A JPS4921796A JP S4921796 A JPS4921796 A JP S4921796A JP 47062416 A JP47062416 A JP 47062416A JP 6241672 A JP6241672 A JP 6241672A JP S4921796 A JPS4921796 A JP S4921796A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6241672A JPS5417268B2 (nl) | 1972-06-23 | 1972-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6241672A JPS5417268B2 (nl) | 1972-06-23 | 1972-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4921796A true JPS4921796A (nl) | 1974-02-26 |
| JPS5417268B2 JPS5417268B2 (nl) | 1979-06-28 |
Family
ID=13199510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6241672A Expired JPS5417268B2 (nl) | 1972-06-23 | 1972-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5417268B2 (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586130A (ja) * | 1981-07-03 | 1983-01-13 | Fujitsu Ltd | 電子ビ−ムの偏向補正方法 |
| JPS5811960U (ja) * | 1981-07-15 | 1983-01-25 | 株式会社三協精機製作所 | 小型モ−タ− |
-
1972
- 1972-06-23 JP JP6241672A patent/JPS5417268B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586130A (ja) * | 1981-07-03 | 1983-01-13 | Fujitsu Ltd | 電子ビ−ムの偏向補正方法 |
| JPS5811960U (ja) * | 1981-07-15 | 1983-01-25 | 株式会社三協精機製作所 | 小型モ−タ− |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5417268B2 (nl) | 1979-06-28 |