JPS4921467B1 - - Google Patents
Info
- Publication number
- JPS4921467B1 JPS4921467B1 JP45106198A JP10619870A JPS4921467B1 JP S4921467 B1 JPS4921467 B1 JP S4921467B1 JP 45106198 A JP45106198 A JP 45106198A JP 10619870 A JP10619870 A JP 10619870A JP S4921467 B1 JPS4921467 B1 JP S4921467B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45106198A JPS4921467B1 (ja) | 1970-12-01 | 1970-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45106198A JPS4921467B1 (ja) | 1970-12-01 | 1970-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4921467B1 true JPS4921467B1 (ja) | 1974-06-01 |
Family
ID=14427461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45106198A Pending JPS4921467B1 (ja) | 1970-12-01 | 1970-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4921467B1 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005351312A (ja) * | 2004-06-08 | 2005-12-22 | Psc Kk | 移動機構 |
| JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |
-
1970
- 1970-12-01 JP JP45106198A patent/JPS4921467B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005351312A (ja) * | 2004-06-08 | 2005-12-22 | Psc Kk | 移動機構 |
| JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |