JPS4921263A - - Google Patents
Info
- Publication number
- JPS4921263A JPS4921263A JP5949372A JP5949372A JPS4921263A JP S4921263 A JPS4921263 A JP S4921263A JP 5949372 A JP5949372 A JP 5949372A JP 5949372 A JP5949372 A JP 5949372A JP S4921263 A JPS4921263 A JP S4921263A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Positive-Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47059493A JPS5759438B2 (ar) | 1972-06-16 | 1972-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47059493A JPS5759438B2 (ar) | 1972-06-16 | 1972-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4921263A true JPS4921263A (ar) | 1974-02-25 |
| JPS5759438B2 JPS5759438B2 (ar) | 1982-12-14 |
Family
ID=13114858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47059493A Expired JPS5759438B2 (ar) | 1972-06-16 | 1972-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5759438B2 (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012007838A (ja) * | 2010-06-25 | 2012-01-12 | Panasonic Electric Works Co Ltd | 空調システム |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815346U (ja) * | 1981-07-23 | 1983-01-31 | 株式会社東芝 | ウエハ回転装置 |
| JPS61195046U (ar) * | 1985-05-27 | 1986-12-04 | ||
| JPS63173327A (ja) * | 1987-01-13 | 1988-07-16 | Nec Corp | 半導体装置の製造装置 |
-
1972
- 1972-06-16 JP JP47059493A patent/JPS5759438B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012007838A (ja) * | 2010-06-25 | 2012-01-12 | Panasonic Electric Works Co Ltd | 空調システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5759438B2 (ar) | 1982-12-14 |