JPS4917191U - - Google Patents
Info
- Publication number
- JPS4917191U JPS4917191U JP5684272U JP5684272U JPS4917191U JP S4917191 U JPS4917191 U JP S4917191U JP 5684272 U JP5684272 U JP 5684272U JP 5684272 U JP5684272 U JP 5684272U JP S4917191 U JPS4917191 U JP S4917191U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5684272U JPS5130947Y2 (ja) | 1972-05-17 | 1972-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5684272U JPS5130947Y2 (ja) | 1972-05-17 | 1972-05-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917191U true JPS4917191U (ja) | 1974-02-13 |
| JPS5130947Y2 JPS5130947Y2 (ja) | 1976-08-03 |
Family
ID=27942293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5684272U Expired JPS5130947Y2 (ja) | 1972-05-17 | 1972-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5130947Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59155843A (ja) * | 1984-01-27 | 1984-09-05 | Hitachi Ltd | 露光装置 |
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
-
1972
- 1972-05-17 JP JP5684272U patent/JPS5130947Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59155843A (ja) * | 1984-01-27 | 1984-09-05 | Hitachi Ltd | 露光装置 |
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
| JPH0261131B2 (ja) * | 1988-04-22 | 1990-12-19 | Canon Kk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5130947Y2 (ja) | 1976-08-03 |