JPS4915899A - - Google Patents

Info

Publication number
JPS4915899A
JPS4915899A JP5651272A JP5651272A JPS4915899A JP S4915899 A JPS4915899 A JP S4915899A JP 5651272 A JP5651272 A JP 5651272A JP 5651272 A JP5651272 A JP 5651272A JP S4915899 A JPS4915899 A JP S4915899A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5651272A
Other languages
Japanese (ja)
Other versions
JPS5236240B2 (lt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651272A priority Critical patent/JPS5236240B2/ja
Publication of JPS4915899A publication Critical patent/JPS4915899A/ja
Publication of JPS5236240B2 publication Critical patent/JPS5236240B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5651272A 1972-06-08 1972-06-08 Expired JPS5236240B2 (lt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (lt) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (lt) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4915899A true JPS4915899A (lt) 1974-02-12
JPS5236240B2 JPS5236240B2 (lt) 1977-09-14

Family

ID=13029164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651272A Expired JPS5236240B2 (lt) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5236240B2 (lt)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U (lt) * 1989-09-08 1991-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U (lt) * 1989-09-08 1991-04-25

Also Published As

Publication number Publication date
JPS5236240B2 (lt) 1977-09-14

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