JPS4915000A - - Google Patents
Info
- Publication number
- JPS4915000A JPS4915000A JP47054243A JP5424372A JPS4915000A JP S4915000 A JPS4915000 A JP S4915000A JP 47054243 A JP47054243 A JP 47054243A JP 5424372 A JP5424372 A JP 5424372A JP S4915000 A JPS4915000 A JP S4915000A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5424372A JPS5432509B2 (e) | 1972-06-02 | 1972-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5424372A JPS5432509B2 (e) | 1972-06-02 | 1972-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4915000A true JPS4915000A (e) | 1974-02-08 |
| JPS5432509B2 JPS5432509B2 (e) | 1979-10-15 |
Family
ID=12965090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5424372A Expired JPS5432509B2 (e) | 1972-06-02 | 1972-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5432509B2 (e) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50123275A (e) * | 1974-03-13 | 1975-09-27 | ||
| JPS5271536U (e) * | 1975-11-21 | 1977-05-28 | ||
| JPS58194343A (ja) * | 1982-05-10 | 1983-11-12 | Toshiba Corp | 半導体装置の製造方法 |
| JPS61159576A (ja) * | 1984-12-21 | 1986-07-19 | アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド | 紫外線に対し透明な窒化シリコン膜を形成する方法 |
-
1972
- 1972-06-02 JP JP5424372A patent/JPS5432509B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50123275A (e) * | 1974-03-13 | 1975-09-27 | ||
| JPS5339312B2 (e) * | 1974-03-13 | 1978-10-20 | ||
| JPS5271536U (e) * | 1975-11-21 | 1977-05-28 | ||
| JPS58194343A (ja) * | 1982-05-10 | 1983-11-12 | Toshiba Corp | 半導体装置の製造方法 |
| JPH0414499B2 (e) * | 1982-05-10 | 1992-03-13 | Tokyo Shibaura Electric Co | |
| JPS61159576A (ja) * | 1984-12-21 | 1986-07-19 | アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド | 紫外線に対し透明な窒化シリコン膜を形成する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5432509B2 (e) | 1979-10-15 |