JPS4915000A - - Google Patents

Info

Publication number
JPS4915000A
JPS4915000A JP47054243A JP5424372A JPS4915000A JP S4915000 A JPS4915000 A JP S4915000A JP 47054243 A JP47054243 A JP 47054243A JP 5424372 A JP5424372 A JP 5424372A JP S4915000 A JPS4915000 A JP S4915000A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47054243A
Other languages
Japanese (ja)
Other versions
JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5424372A priority Critical patent/JPS5432509B2/ja
Publication of JPS4915000A publication Critical patent/JPS4915000A/ja
Publication of JPS5432509B2 publication Critical patent/JPS5432509B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
JP5424372A 1972-06-02 1972-06-02 Expired JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5424372A JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-02 1972-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5424372A JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-02 1972-06-02

Publications (2)

Publication Number Publication Date
JPS4915000A true JPS4915000A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-08
JPS5432509B2 JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-10-15

Family

ID=12965090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5424372A Expired JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-02 1972-06-02

Country Status (1)

Country Link
JP (1) JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50123275A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-03-13 1975-09-27
JPS5271536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-21 1977-05-28
JPS58194343A (ja) * 1982-05-10 1983-11-12 Toshiba Corp 半導体装置の製造方法
JPS61159576A (ja) * 1984-12-21 1986-07-19 アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド 紫外線に対し透明な窒化シリコン膜を形成する方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50123275A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-03-13 1975-09-27
JPS5271536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-11-21 1977-05-28
JPS58194343A (ja) * 1982-05-10 1983-11-12 Toshiba Corp 半導体装置の製造方法
JPS61159576A (ja) * 1984-12-21 1986-07-19 アドバンスト・マイクロ・ディバイシズ・インコーポレーテッド 紫外線に対し透明な窒化シリコン膜を形成する方法

Also Published As

Publication number Publication date
JPS5432509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-10-15

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