JPS4914087A - - Google Patents
Info
- Publication number
- JPS4914087A JPS4914087A JP4875672A JP4875672A JPS4914087A JP S4914087 A JPS4914087 A JP S4914087A JP 4875672 A JP4875672 A JP 4875672A JP 4875672 A JP4875672 A JP 4875672A JP S4914087 A JPS4914087 A JP S4914087A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4875672A JPS4914087A (de) | 1972-05-16 | 1972-05-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4875672A JPS4914087A (de) | 1972-05-16 | 1972-05-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4914087A true JPS4914087A (de) | 1974-02-07 |
Family
ID=12812109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4875672A Pending JPS4914087A (de) | 1972-05-16 | 1972-05-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4914087A (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03236217A (ja) * | 1990-02-13 | 1991-10-22 | Dainippon Screen Mfg Co Ltd | フォトレジスト膜の剥離方法及びその装置 |
WO1996029849A1 (fr) * | 1995-03-20 | 1996-09-26 | Hitachi, Ltd. | Procede et dispositif de fabrication d'une plaquette a circuits imprimes |
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1972
- 1972-05-16 JP JP4875672A patent/JPS4914087A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03236217A (ja) * | 1990-02-13 | 1991-10-22 | Dainippon Screen Mfg Co Ltd | フォトレジスト膜の剥離方法及びその装置 |
WO1996029849A1 (fr) * | 1995-03-20 | 1996-09-26 | Hitachi, Ltd. | Procede et dispositif de fabrication d'une plaquette a circuits imprimes |