JPS49135581A - - Google Patents

Info

Publication number
JPS49135581A
JPS49135581A JP4820773A JP4820773A JPS49135581A JP S49135581 A JPS49135581 A JP S49135581A JP 4820773 A JP4820773 A JP 4820773A JP 4820773 A JP4820773 A JP 4820773A JP S49135581 A JPS49135581 A JP S49135581A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4820773A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4820773A priority Critical patent/JPS49135581A/ja
Publication of JPS49135581A publication Critical patent/JPS49135581A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4820773A 1973-04-28 1973-04-28 Pending JPS49135581A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4820773A JPS49135581A (cs) 1973-04-28 1973-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4820773A JPS49135581A (cs) 1973-04-28 1973-04-28

Publications (1)

Publication Number Publication Date
JPS49135581A true JPS49135581A (cs) 1974-12-27

Family

ID=12796933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4820773A Pending JPS49135581A (cs) 1973-04-28 1973-04-28

Country Status (1)

Country Link
JP (1) JPS49135581A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249770A (en) * 1975-10-20 1977-04-21 Toshiba Corp Pattern inspection device
JPS55124008A (en) * 1979-03-19 1980-09-24 Toshiba Corp Defect inspecting apparatus
JPS63190352A (ja) * 1987-02-02 1988-08-05 Matsushita Electronics Corp 半導体ウェハ検査方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249770A (en) * 1975-10-20 1977-04-21 Toshiba Corp Pattern inspection device
JPS55124008A (en) * 1979-03-19 1980-09-24 Toshiba Corp Defect inspecting apparatus
JPS63190352A (ja) * 1987-02-02 1988-08-05 Matsushita Electronics Corp 半導体ウェハ検査方法

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