JPS49131783A - - Google Patents

Info

Publication number
JPS49131783A
JPS49131783A JP4585873A JP4585873A JPS49131783A JP S49131783 A JPS49131783 A JP S49131783A JP 4585873 A JP4585873 A JP 4585873A JP 4585873 A JP4585873 A JP 4585873A JP S49131783 A JPS49131783 A JP S49131783A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4585873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4585873A priority Critical patent/JPS49131783A/ja
Publication of JPS49131783A publication Critical patent/JPS49131783A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP4585873A 1973-04-23 1973-04-23 Pending JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4585873A JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-04-23 1973-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4585873A JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-04-23 1973-04-23

Publications (1)

Publication Number Publication Date
JPS49131783A true JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-12-17

Family

ID=12730893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4585873A Pending JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-04-23 1973-04-23

Country Status (1)

Country Link
JP (1) JPS49131783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298502U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-01-21 1977-07-25
JPS6148858A (ja) * 1984-08-17 1986-03-10 Daicel Chem Ind Ltd 真空密着露光方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298502U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-01-21 1977-07-25
JPS6148858A (ja) * 1984-08-17 1986-03-10 Daicel Chem Ind Ltd 真空密着露光方法

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