JPS49131380A - - Google Patents
Info
- Publication number
- JPS49131380A JPS49131380A JP4391973A JP4391973A JPS49131380A JP S49131380 A JPS49131380 A JP S49131380A JP 4391973 A JP4391973 A JP 4391973A JP 4391973 A JP4391973 A JP 4391973A JP S49131380 A JPS49131380 A JP S49131380A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4391973A JPS49131380A (OSRAM) | 1973-04-18 | 1973-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4391973A JPS49131380A (OSRAM) | 1973-04-18 | 1973-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49131380A true JPS49131380A (OSRAM) | 1974-12-17 |
Family
ID=12677111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4391973A Pending JPS49131380A (OSRAM) | 1973-04-18 | 1973-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49131380A (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5280777A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Vapor growth process |
| JPS56162827A (en) * | 1980-05-19 | 1981-12-15 | Mitsubishi Electric Corp | Vapor phase growing apparatus |
| JPS60242617A (ja) * | 1985-04-03 | 1985-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 加熱炉 |
| JPS60242618A (ja) * | 1985-04-03 | 1985-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 半導体の加熱処理装置 |
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1973
- 1973-04-18 JP JP4391973A patent/JPS49131380A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5280777A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Vapor growth process |
| JPS56162827A (en) * | 1980-05-19 | 1981-12-15 | Mitsubishi Electric Corp | Vapor phase growing apparatus |
| JPS60242617A (ja) * | 1985-04-03 | 1985-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 加熱炉 |
| JPS60242618A (ja) * | 1985-04-03 | 1985-12-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 半導体の加熱処理装置 |