JPS49125957U - - Google Patents
Info
- Publication number
- JPS49125957U JPS49125957U JP2167773U JP2167773U JPS49125957U JP S49125957 U JPS49125957 U JP S49125957U JP 2167773 U JP2167773 U JP 2167773U JP 2167773 U JP2167773 U JP 2167773U JP S49125957 U JPS49125957 U JP S49125957U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Steam Or Hot-Water Central Heating Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2167773U JPS49125957U (enExample) | 1973-02-21 | 1973-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2167773U JPS49125957U (enExample) | 1973-02-21 | 1973-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49125957U true JPS49125957U (enExample) | 1974-10-29 |
Family
ID=28113482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2167773U Pending JPS49125957U (enExample) | 1973-02-21 | 1973-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49125957U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015129612A (ja) * | 2014-01-08 | 2015-07-16 | 東京エレクトロン株式会社 | 熱交換システム及び同熱交換システムを有する基板処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4525523Y1 (enExample) * | 1967-07-17 | 1970-10-06 |
-
1973
- 1973-02-21 JP JP2167773U patent/JPS49125957U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4525523Y1 (enExample) * | 1967-07-17 | 1970-10-06 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015129612A (ja) * | 2014-01-08 | 2015-07-16 | 東京エレクトロン株式会社 | 熱交換システム及び同熱交換システムを有する基板処理装置 |
| TWI607806B (zh) * | 2014-01-08 | 2017-12-11 | Tokyo Electron Ltd | Heat exchange system and substrate processing apparatus having the heat exchange system |