JPS49125803A - - Google Patents

Info

Publication number
JPS49125803A
JPS49125803A JP3787573A JP3787573A JPS49125803A JP S49125803 A JPS49125803 A JP S49125803A JP 3787573 A JP3787573 A JP 3787573A JP 3787573 A JP3787573 A JP 3787573A JP S49125803 A JPS49125803 A JP S49125803A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3787573A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3787573A priority Critical patent/JPS49125803A/ja
Publication of JPS49125803A publication Critical patent/JPS49125803A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP3787573A 1973-04-04 1973-04-04 Pending JPS49125803A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3787573A JPS49125803A (enrdf_load_stackoverflow) 1973-04-04 1973-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3787573A JPS49125803A (enrdf_load_stackoverflow) 1973-04-04 1973-04-04

Publications (1)

Publication Number Publication Date
JPS49125803A true JPS49125803A (enrdf_load_stackoverflow) 1974-12-02

Family

ID=12509695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3787573A Pending JPS49125803A (enrdf_load_stackoverflow) 1973-04-04 1973-04-04

Country Status (1)

Country Link
JP (1) JPS49125803A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596769A (ja) * 1982-06-30 1984-01-13 Fujitsu Ltd 転動モ−タ
JPH07279601A (ja) * 1994-04-04 1995-10-27 Shinano Electron:Kk ステッピングエアモータ及びそれを用いた半導体検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596769A (ja) * 1982-06-30 1984-01-13 Fujitsu Ltd 転動モ−タ
JPH07279601A (ja) * 1994-04-04 1995-10-27 Shinano Electron:Kk ステッピングエアモータ及びそれを用いた半導体検査装置

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