JPS49122278A - - Google Patents
Info
- Publication number
- JPS49122278A JPS49122278A JP3285473A JP3285473A JPS49122278A JP S49122278 A JPS49122278 A JP S49122278A JP 3285473 A JP3285473 A JP 3285473A JP 3285473 A JP3285473 A JP 3285473A JP S49122278 A JPS49122278 A JP S49122278A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laser Beam Processing (AREA)
- Dicing (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3285473A JPS5643611B2 (ko) | 1973-03-22 | 1973-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3285473A JPS5643611B2 (ko) | 1973-03-22 | 1973-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49122278A true JPS49122278A (ko) | 1974-11-22 |
| JPS5643611B2 JPS5643611B2 (ko) | 1981-10-14 |
Family
ID=12370411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3285473A Expired JPS5643611B2 (ko) | 1973-03-22 | 1973-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5643611B2 (ko) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5039045A (ko) * | 1973-08-08 | 1975-04-10 | ||
| JPS53123657A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Production of semiconductor unit |
| JPS60102288A (ja) * | 1983-11-07 | 1985-06-06 | Semiconductor Energy Lab Co Ltd | 有機樹脂上被膜のレ−ザ加工方法 |
| JPS60102289A (ja) * | 1983-11-07 | 1985-06-06 | Semiconductor Energy Lab Co Ltd | 有機樹脂上被膜のレ−ザ加工方法 |
| JP2003124154A (ja) * | 2001-10-15 | 2003-04-25 | Shinko Electric Ind Co Ltd | シリコン基板の穴形成方法 |
| JP2006203251A (ja) * | 2004-10-07 | 2006-08-03 | Showa Denko Kk | 半導体素子の製造方法 |
| US7875898B2 (en) | 2005-01-24 | 2011-01-25 | Panasonic Corporation | Semiconductor device |
| JP2011082546A (ja) * | 2004-06-11 | 2011-04-21 | Showa Denko Kk | 化合物半導体素子ウェハーの製造方法 |
| JP2011097024A (ja) * | 2009-09-29 | 2011-05-12 | Jsr Corp | 光半導体素子の製造方法、及び、光半導体素子保護層形成用組成物 |
| JP2013051246A (ja) * | 2011-08-30 | 2013-03-14 | Mitsuboshi Diamond Industrial Co Ltd | Ｌｅｄパターン付き基板の加工方法 |
-
1973
- 1973-03-22 JP JP3285473A patent/JPS5643611B2/ja not_active Expired
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5039045A (ko) * | 1973-08-08 | 1975-04-10 | ||
| JPS53123657A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Production of semiconductor unit |
| JPS6156617B2 (ko) * | 1977-04-04 | 1986-12-03 | Nippon Electric Co | |
| JPS60102288A (ja) * | 1983-11-07 | 1985-06-06 | Semiconductor Energy Lab Co Ltd | 有機樹脂上被膜のレ−ザ加工方法 |
| JPS60102289A (ja) * | 1983-11-07 | 1985-06-06 | Semiconductor Energy Lab Co Ltd | 有機樹脂上被膜のレ−ザ加工方法 |
| JP2003124154A (ja) * | 2001-10-15 | 2003-04-25 | Shinko Electric Ind Co Ltd | シリコン基板の穴形成方法 |
| JP2011082546A (ja) * | 2004-06-11 | 2011-04-21 | Showa Denko Kk | 化合物半導体素子ウェハーの製造方法 |
| JP2006203251A (ja) * | 2004-10-07 | 2006-08-03 | Showa Denko Kk | 半導体素子の製造方法 |
| US7875898B2 (en) | 2005-01-24 | 2011-01-25 | Panasonic Corporation | Semiconductor device |
| JP2011097024A (ja) * | 2009-09-29 | 2011-05-12 | Jsr Corp | 光半導体素子の製造方法、及び、光半導体素子保護層形成用組成物 |
| JP2013051246A (ja) * | 2011-08-30 | 2013-03-14 | Mitsuboshi Diamond Industrial Co Ltd | Ｌｅｄパターン付き基板の加工方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5643611B2 (ko) | 1981-10-14 |