JPS491173A - - Google Patents
Info
- Publication number
- JPS491173A JPS491173A JP3797372A JP3797372A JPS491173A JP S491173 A JPS491173 A JP S491173A JP 3797372 A JP3797372 A JP 3797372A JP 3797372 A JP3797372 A JP 3797372A JP S491173 A JPS491173 A JP S491173A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3797372A JPS5436451B2 (ja) | 1972-04-15 | 1972-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3797372A JPS5436451B2 (ja) | 1972-04-15 | 1972-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS491173A true JPS491173A (ja) | 1974-01-08 |
| JPS5436451B2 JPS5436451B2 (ja) | 1979-11-09 |
Family
ID=12512492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3797372A Expired JPS5436451B2 (ja) | 1972-04-15 | 1972-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5436451B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586140A (ja) * | 1981-07-03 | 1983-01-13 | Nec Corp | シリコンウエ−ハの製造方法 |
-
1972
- 1972-04-15 JP JP3797372A patent/JPS5436451B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586140A (ja) * | 1981-07-03 | 1983-01-13 | Nec Corp | シリコンウエ−ハの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5436451B2 (ja) | 1979-11-09 |