JPS49116868A - - Google Patents

Info

Publication number
JPS49116868A
JPS49116868A JP48028119A JP2811973A JPS49116868A JP S49116868 A JPS49116868 A JP S49116868A JP 48028119 A JP48028119 A JP 48028119A JP 2811973 A JP2811973 A JP 2811973A JP S49116868 A JPS49116868 A JP S49116868A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48028119A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48028119A priority Critical patent/JPS49116868A/ja
Publication of JPS49116868A publication Critical patent/JPS49116868A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP48028119A 1973-03-10 1973-03-10 Pending JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48028119A JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-03-10 1973-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48028119A JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-03-10 1973-03-10

Publications (1)

Publication Number Publication Date
JPS49116868A true JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-11-08

Family

ID=12239902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48028119A Pending JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-03-10 1973-03-10

Country Status (1)

Country Link
JP (1) JPS49116868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51132536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-04-18 1976-10-25
JPH0725969U (ja) * 1991-01-17 1995-05-16 太平工業株式会社 塗装装置の塗料用配管の内面洗淨装置
US7367346B2 (en) 1997-06-23 2008-05-06 Princeton Trade & Technology, Inc. Method for cleaning hollow tubing and fibers
JP2015167938A (ja) * 2014-03-10 2015-09-28 株式会社Screenホールディングス 基板処理装置
TWI709443B (zh) * 2014-03-10 2020-11-11 日商斯克林集團公司 基板處理裝置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51132536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-04-18 1976-10-25
JPH0725969U (ja) * 1991-01-17 1995-05-16 太平工業株式会社 塗装装置の塗料用配管の内面洗淨装置
US7367346B2 (en) 1997-06-23 2008-05-06 Princeton Trade & Technology, Inc. Method for cleaning hollow tubing and fibers
JP2015167938A (ja) * 2014-03-10 2015-09-28 株式会社Screenホールディングス 基板処理装置
TWI709443B (zh) * 2014-03-10 2020-11-11 日商斯克林集團公司 基板處理裝置
TWI760883B (zh) * 2014-03-10 2022-04-11 日商斯克林集團公司 基板處理系統及配管洗淨方法

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