JPS49112159U - - Google Patents

Info

Publication number
JPS49112159U
JPS49112159U JP472073U JP472073U JPS49112159U JP S49112159 U JPS49112159 U JP S49112159U JP 472073 U JP472073 U JP 472073U JP 472073 U JP472073 U JP 472073U JP S49112159 U JPS49112159 U JP S49112159U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP472073U
Other languages
Japanese (ja)
Other versions
JPS5337582Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP472073U priority Critical patent/JPS5337582Y2/ja
Publication of JPS49112159U publication Critical patent/JPS49112159U/ja
Application granted granted Critical
Publication of JPS5337582Y2 publication Critical patent/JPS5337582Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP472073U 1972-12-29 1972-12-29 Expired JPS5337582Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP472073U JPS5337582Y2 (cg-RX-API-DMAC7.html) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP472073U JPS5337582Y2 (cg-RX-API-DMAC7.html) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS49112159U true JPS49112159U (cg-RX-API-DMAC7.html) 1974-09-25
JPS5337582Y2 JPS5337582Y2 (cg-RX-API-DMAC7.html) 1978-09-12

Family

ID=28066719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP472073U Expired JPS5337582Y2 (cg-RX-API-DMAC7.html) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5337582Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262868U (cg-RX-API-DMAC7.html) * 1985-10-07 1987-04-18
JPS6369564A (ja) * 1986-09-10 1988-03-29 Dainippon Screen Mfg Co Ltd 基板の回転塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262868U (cg-RX-API-DMAC7.html) * 1985-10-07 1987-04-18
JPS6369564A (ja) * 1986-09-10 1988-03-29 Dainippon Screen Mfg Co Ltd 基板の回転塗布装置

Also Published As

Publication number Publication date
JPS5337582Y2 (cg-RX-API-DMAC7.html) 1978-09-12

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