JPS49111873A - - Google Patents
Info
- Publication number
- JPS49111873A JPS49111873A JP2312673A JP2312673A JPS49111873A JP S49111873 A JPS49111873 A JP S49111873A JP 2312673 A JP2312673 A JP 2312673A JP 2312673 A JP2312673 A JP 2312673A JP S49111873 A JPS49111873 A JP S49111873A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312673A JPS49111873A (enExample) | 1973-02-28 | 1973-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312673A JPS49111873A (enExample) | 1973-02-28 | 1973-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49111873A true JPS49111873A (enExample) | 1974-10-24 |
Family
ID=12101809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2312673A Pending JPS49111873A (enExample) | 1973-02-28 | 1973-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49111873A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107875A (en) * | 1978-02-14 | 1979-08-24 | Toshiba Corp | Producing apparatus for activated gas |
| JPH03288539A (ja) * | 1990-04-04 | 1991-12-18 | Nippon Koshuha Kk | 合成高周波プラズマ反応装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3275412A (en) * | 1965-02-04 | 1966-09-27 | American Cyanamid Co | Production of oxides by plasma process |
-
1973
- 1973-02-28 JP JP2312673A patent/JPS49111873A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3275412A (en) * | 1965-02-04 | 1966-09-27 | American Cyanamid Co | Production of oxides by plasma process |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107875A (en) * | 1978-02-14 | 1979-08-24 | Toshiba Corp | Producing apparatus for activated gas |
| JPH03288539A (ja) * | 1990-04-04 | 1991-12-18 | Nippon Koshuha Kk | 合成高周波プラズマ反応装置 |