JPS4911074A - - Google Patents
Info
- Publication number
- JPS4911074A JPS4911074A JP47051667A JP5166772A JPS4911074A JP S4911074 A JPS4911074 A JP S4911074A JP 47051667 A JP47051667 A JP 47051667A JP 5166772 A JP5166772 A JP 5166772A JP S4911074 A JPS4911074 A JP S4911074A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5166772A JPS5336757B2 (en:Method) | 1972-05-26 | 1972-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5166772A JPS5336757B2 (en:Method) | 1972-05-26 | 1972-05-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4911074A true JPS4911074A (en:Method) | 1974-01-31 |
| JPS5336757B2 JPS5336757B2 (en:Method) | 1978-10-04 |
Family
ID=12893220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5166772A Expired JPS5336757B2 (en:Method) | 1972-05-26 | 1972-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5336757B2 (en:Method) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547277A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5757537U (en:Method) * | 1981-08-13 | 1982-04-05 | ||
| JPS587111U (ja) * | 1982-06-18 | 1983-01-18 | 日本電信電話株式会社 | ステ−ジの回転微動装置 |
| JPS6080802U (ja) * | 1983-11-09 | 1985-06-05 | 株式会社昌運工作所 | 微調整刃物台 |
| JPS61145938U (en:Method) * | 1985-02-28 | 1986-09-09 | ||
| JPS61151840U (en:Method) * | 1985-03-08 | 1986-09-19 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5595090U (en:Method) * | 1978-12-22 | 1980-07-01 |
-
1972
- 1972-05-26 JP JP5166772A patent/JPS5336757B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547277A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5757537U (en:Method) * | 1981-08-13 | 1982-04-05 | ||
| JPS587111U (ja) * | 1982-06-18 | 1983-01-18 | 日本電信電話株式会社 | ステ−ジの回転微動装置 |
| JPS6080802U (ja) * | 1983-11-09 | 1985-06-05 | 株式会社昌運工作所 | 微調整刃物台 |
| JPS61145938U (en:Method) * | 1985-02-28 | 1986-09-09 | ||
| JPS61151840U (en:Method) * | 1985-03-08 | 1986-09-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5336757B2 (en:Method) | 1978-10-04 |