JPS49107949U - - Google Patents
Info
- Publication number
- JPS49107949U JPS49107949U JP500272U JP500272U JPS49107949U JP S49107949 U JPS49107949 U JP S49107949U JP 500272 U JP500272 U JP 500272U JP 500272 U JP500272 U JP 500272U JP S49107949 U JPS49107949 U JP S49107949U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500272U JPS49107949U (ja) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500272U JPS49107949U (ja) | 1972-12-29 | 1972-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49107949U true JPS49107949U (ja) | 1974-09-14 |
Family
ID=28067485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP500272U Pending JPS49107949U (ja) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49107949U (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03505386A (ja) * | 1988-04-19 | 1991-11-21 | オーキッド，ワン，コーポレーション | 封入型高輝度電子ビーム源およびシステム |
| JP2010010125A (ja) * | 2008-05-28 | 2010-01-14 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
| WO2014181685A1 (ja) * | 2013-05-10 | 2014-11-13 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1972
- 1972-12-29 JP JP500272U patent/JPS49107949U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03505386A (ja) * | 1988-04-19 | 1991-11-21 | オーキッド，ワン，コーポレーション | 封入型高輝度電子ビーム源およびシステム |
| JP2010010125A (ja) * | 2008-05-28 | 2010-01-14 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
| WO2014181685A1 (ja) * | 2013-05-10 | 2014-11-13 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP5853122B2 (ja) * | 2013-05-10 | 2016-02-09 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| US9349567B2 (en) | 2013-05-10 | 2016-05-24 | Hitachi High-Technologies Corporation | Charged particle beam device |