JPS49105469A - - Google Patents
Info
- Publication number
- JPS49105469A JPS49105469A JP1468573A JP1468573A JPS49105469A JP S49105469 A JPS49105469 A JP S49105469A JP 1468573 A JP1468573 A JP 1468573A JP 1468573 A JP1468573 A JP 1468573A JP S49105469 A JPS49105469 A JP S49105469A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1468573A JPS49105469A (ja) | 1973-02-07 | 1973-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1468573A JPS49105469A (ja) | 1973-02-07 | 1973-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49105469A true JPS49105469A (ja) | 1974-10-05 |
Family
ID=11868049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1468573A Pending JPS49105469A (ja) | 1973-02-07 | 1973-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49105469A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149565U (ja) * | 1977-04-30 | 1978-11-25 | ||
| JPS5735952U (ja) * | 1980-08-08 | 1982-02-25 | ||
| JPS60165719A (ja) * | 1984-02-08 | 1985-08-28 | Kimoto & Co Ltd | 半導体集積回路製造用マスク基板、ウエハ−等の表面保護液およびその使用方法 |
| WO1989001650A1 (en) * | 1987-08-10 | 1989-02-23 | Idemitsu Petrochemical Company Limited | Durable patterning member |
-
1973
- 1973-02-07 JP JP1468573A patent/JPS49105469A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149565U (ja) * | 1977-04-30 | 1978-11-25 | ||
| JPH02740Y2 (ja) * | 1977-04-30 | 1990-01-10 | ||
| JPS5735952U (ja) * | 1980-08-08 | 1982-02-25 | ||
| JPS60165719A (ja) * | 1984-02-08 | 1985-08-28 | Kimoto & Co Ltd | 半導体集積回路製造用マスク基板、ウエハ−等の表面保護液およびその使用方法 |
| WO1989001650A1 (en) * | 1987-08-10 | 1989-02-23 | Idemitsu Petrochemical Company Limited | Durable patterning member |
| US5051295A (en) * | 1987-08-10 | 1991-09-24 | Idemitsu Petrochemical Company Limited | Protective film for photo masks and lith films |