JPS49101916A - - Google Patents
Info
- Publication number
- JPS49101916A JPS49101916A JP1258273A JP1258273A JPS49101916A JP S49101916 A JPS49101916 A JP S49101916A JP 1258273 A JP1258273 A JP 1258273A JP 1258273 A JP1258273 A JP 1258273A JP S49101916 A JPS49101916 A JP S49101916A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258273A JPS525367B2 (https=) | 1973-01-31 | 1973-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258273A JPS525367B2 (https=) | 1973-01-31 | 1973-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49101916A true JPS49101916A (https=) | 1974-09-26 |
| JPS525367B2 JPS525367B2 (https=) | 1977-02-12 |
Family
ID=11809336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1258273A Expired JPS525367B2 (https=) | 1973-01-31 | 1973-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS525367B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0188753U (https=) * | 1987-12-03 | 1989-06-12 | ||
| US8037891B2 (en) | 2004-03-09 | 2011-10-18 | Tokyo Electron Limited | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5477380A (en) * | 1977-12-02 | 1979-06-20 | Wako Sangiyou Kk | Centrifugal separation type air purifier |
| JPS5528434U (https=) * | 1978-08-11 | 1980-02-23 |
-
1973
- 1973-01-31 JP JP1258273A patent/JPS525367B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0188753U (https=) * | 1987-12-03 | 1989-06-12 | ||
| US8037891B2 (en) | 2004-03-09 | 2011-10-18 | Tokyo Electron Limited | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS525367B2 (https=) | 1977-02-12 |