JPS525367B2 - - Google Patents

Info

Publication number
JPS525367B2
JPS525367B2 JP1258273A JP1258273A JPS525367B2 JP S525367 B2 JPS525367 B2 JP S525367B2 JP 1258273 A JP1258273 A JP 1258273A JP 1258273 A JP1258273 A JP 1258273A JP S525367 B2 JPS525367 B2 JP S525367B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1258273A
Other versions
JPS49101916A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1258273A priority Critical patent/JPS525367B2/ja
Publication of JPS49101916A publication Critical patent/JPS49101916A/ja
Publication of JPS525367B2 publication Critical patent/JPS525367B2/ja
Expired legal-status Critical Current

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  • Nozzles (AREA)
JP1258273A 1973-01-31 1973-01-31 Expired JPS525367B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1258273A JPS525367B2 (ja) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1258273A JPS525367B2 (ja) 1973-01-31 1973-01-31

Publications (2)

Publication Number Publication Date
JPS49101916A JPS49101916A (ja) 1974-09-26
JPS525367B2 true JPS525367B2 (ja) 1977-02-12

Family

ID=11809336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1258273A Expired JPS525367B2 (ja) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS525367B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477380A (en) * 1977-12-02 1979-06-20 Wako Sangiyou Kk Centrifugal separation type air purifier
JPS5528434U (ja) * 1978-08-11 1980-02-23

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0188753U (ja) * 1987-12-03 1989-06-12
TWI251857B (en) 2004-03-09 2006-03-21 Tokyo Electron Ltd Two-fluid nozzle for cleaning substrate and substrate cleaning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477380A (en) * 1977-12-02 1979-06-20 Wako Sangiyou Kk Centrifugal separation type air purifier
JPS5528434U (ja) * 1978-08-11 1980-02-23

Also Published As

Publication number Publication date
JPS49101916A (ja) 1974-09-26

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