JPS525367B2 - - Google Patents
Info
- Publication number
- JPS525367B2 JPS525367B2 JP1258273A JP1258273A JPS525367B2 JP S525367 B2 JPS525367 B2 JP S525367B2 JP 1258273 A JP1258273 A JP 1258273A JP 1258273 A JP1258273 A JP 1258273A JP S525367 B2 JPS525367 B2 JP S525367B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Nozzles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1258273A JPS525367B2 (ja) | 1973-01-31 | 1973-01-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1258273A JPS525367B2 (ja) | 1973-01-31 | 1973-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49101916A JPS49101916A (ja) | 1974-09-26 |
JPS525367B2 true JPS525367B2 (ja) | 1977-02-12 |
Family
ID=11809336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1258273A Expired JPS525367B2 (ja) | 1973-01-31 | 1973-01-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS525367B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5477380A (en) * | 1977-12-02 | 1979-06-20 | Wako Sangiyou Kk | Centrifugal separation type air purifier |
JPS5528434U (ja) * | 1978-08-11 | 1980-02-23 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0188753U (ja) * | 1987-12-03 | 1989-06-12 | ||
TWI251857B (en) | 2004-03-09 | 2006-03-21 | Tokyo Electron Ltd | Two-fluid nozzle for cleaning substrate and substrate cleaning device |
-
1973
- 1973-01-31 JP JP1258273A patent/JPS525367B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5477380A (en) * | 1977-12-02 | 1979-06-20 | Wako Sangiyou Kk | Centrifugal separation type air purifier |
JPS5528434U (ja) * | 1978-08-11 | 1980-02-23 |
Also Published As
Publication number | Publication date |
---|---|
JPS49101916A (ja) | 1974-09-26 |