JPS49101916A - - Google Patents

Info

Publication number
JPS49101916A
JPS49101916A JP1258273A JP1258273A JPS49101916A JP S49101916 A JPS49101916 A JP S49101916A JP 1258273 A JP1258273 A JP 1258273A JP 1258273 A JP1258273 A JP 1258273A JP S49101916 A JPS49101916 A JP S49101916A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1258273A
Other languages
Japanese (ja)
Other versions
JPS525367B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1258273A priority Critical patent/JPS525367B2/ja
Publication of JPS49101916A publication Critical patent/JPS49101916A/ja
Publication of JPS525367B2 publication Critical patent/JPS525367B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
JP1258273A 1973-01-31 1973-01-31 Expired JPS525367B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1258273A JPS525367B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1258273A JPS525367B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Publications (2)

Publication Number Publication Date
JPS49101916A true JPS49101916A (enrdf_load_stackoverflow) 1974-09-26
JPS525367B2 JPS525367B2 (enrdf_load_stackoverflow) 1977-02-12

Family

ID=11809336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1258273A Expired JPS525367B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS525367B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0188753U (enrdf_load_stackoverflow) * 1987-12-03 1989-06-12
US8037891B2 (en) 2004-03-09 2011-10-18 Tokyo Electron Limited Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477380A (en) * 1977-12-02 1979-06-20 Wako Sangiyou Kk Centrifugal separation type air purifier
JPS5528434U (enrdf_load_stackoverflow) * 1978-08-11 1980-02-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0188753U (enrdf_load_stackoverflow) * 1987-12-03 1989-06-12
US8037891B2 (en) 2004-03-09 2011-10-18 Tokyo Electron Limited Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus

Also Published As

Publication number Publication date
JPS525367B2 (enrdf_load_stackoverflow) 1977-02-12

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