JPS49100513A - - Google Patents
Info
- Publication number
- JPS49100513A JPS49100513A JP48008961A JP896173A JPS49100513A JP S49100513 A JPS49100513 A JP S49100513A JP 48008961 A JP48008961 A JP 48008961A JP 896173 A JP896173 A JP 896173A JP S49100513 A JPS49100513 A JP S49100513A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Control Of Linear Motors (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP896173A JPS5423404B2 (enExample) | 1973-01-20 | 1973-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP896173A JPS5423404B2 (enExample) | 1973-01-20 | 1973-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49100513A true JPS49100513A (enExample) | 1974-09-24 |
| JPS5423404B2 JPS5423404B2 (enExample) | 1979-08-14 |
Family
ID=11707253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP896173A Expired JPS5423404B2 (enExample) | 1973-01-20 | 1973-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5423404B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015099916A (ja) * | 2013-10-16 | 2015-05-28 | キヤノン株式会社 | ステージ装置、リソグラフィ装置、それを用いた物品の製造方法 |
| JP2016101019A (ja) * | 2014-11-25 | 2016-05-30 | 株式会社日立製作所 | リニアモータ及びリニアモータを搭載した圧縮機 |
-
1973
- 1973-01-20 JP JP896173A patent/JPS5423404B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015099916A (ja) * | 2013-10-16 | 2015-05-28 | キヤノン株式会社 | ステージ装置、リソグラフィ装置、それを用いた物品の製造方法 |
| JP2016101019A (ja) * | 2014-11-25 | 2016-05-30 | 株式会社日立製作所 | リニアモータ及びリニアモータを搭載した圧縮機 |
| US10090748B2 (en) | 2014-11-25 | 2018-10-02 | Hitachi, Ltd. | Linear motor and compressor equipped with linear motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5423404B2 (enExample) | 1979-08-14 |