JPS4898891A - - Google Patents
Info
- Publication number
- JPS4898891A JPS4898891A JP48021429A JP2142973A JPS4898891A JP S4898891 A JPS4898891 A JP S4898891A JP 48021429 A JP48021429 A JP 48021429A JP 2142973 A JP2142973 A JP 2142973A JP S4898891 A JPS4898891 A JP S4898891A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7206290A FR2173436A5 (de) | 1972-02-24 | 1972-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4898891A true JPS4898891A (de) | 1973-12-14 |
Family
ID=9094061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48021429A Pending JPS4898891A (de) | 1972-02-24 | 1973-02-23 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS4898891A (de) |
| DE (1) | DE2309181A1 (de) |
| FR (1) | FR2173436A5 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354057U (de) * | 1986-09-27 | 1988-04-11 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2498767A1 (fr) * | 1981-01-23 | 1982-07-30 | Cameca | Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement |
| US4810077A (en) * | 1986-02-13 | 1989-03-07 | Spectra-Tech, Inc. | Grazing angle microscope |
| FR2596863B1 (fr) * | 1986-04-07 | 1988-06-17 | Centre Nat Rech Scient | Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique |
| EP0254128A3 (de) * | 1986-07-25 | 1990-01-03 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe |
| GB8707516D0 (en) * | 1987-03-30 | 1987-05-07 | Vg Instr Group | Surface analysis |
| DE102009015341A1 (de) * | 2009-03-27 | 2010-10-07 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur optischen Untersuchung von Proben |
| US20220216028A1 (en) | 2019-05-09 | 2022-07-07 | Attolight AG | Cathodoluminescence electron microscope |
| US11227743B2 (en) | 2019-08-20 | 2022-01-18 | Attolight AG | Accurate wavelength calibration in cathodoluminescence SEM |
| US11782001B2 (en) | 2020-12-04 | 2023-10-10 | Attolight AG | Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements |
| TWI808554B (zh) | 2020-12-04 | 2023-07-11 | 亞光股份有限公司 | 使用陰極發光測量判別半導體材料中的位錯類型和密度的裝置與方法 |
| TWI836325B (zh) | 2021-01-19 | 2024-03-21 | 瑞士商亞光股份有限公司 | 陰極發光顯微鏡、使用該顯微鏡檢查晶圓的方法及操作該顯微鏡的方法 |
-
1972
- 1972-02-24 FR FR7206290A patent/FR2173436A5/fr not_active Expired
-
1973
- 1973-02-23 DE DE19732309181 patent/DE2309181A1/de active Pending
- 1973-02-23 JP JP48021429A patent/JPS4898891A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354057U (de) * | 1986-09-27 | 1988-04-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2173436A5 (de) | 1973-10-05 |
| DE2309181A1 (de) | 1973-10-11 |