JPS4898781A - - Google Patents

Info

Publication number
JPS4898781A
JPS4898781A JP3104672A JP3104672A JPS4898781A JP S4898781 A JPS4898781 A JP S4898781A JP 3104672 A JP3104672 A JP 3104672A JP 3104672 A JP3104672 A JP 3104672A JP S4898781 A JPS4898781 A JP S4898781A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3104672A
Other languages
Japanese (ja)
Other versions
JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3104672A priority Critical patent/JPS5418110B2/ja
Publication of JPS4898781A publication Critical patent/JPS4898781A/ja
Publication of JPS5418110B2 publication Critical patent/JPS5418110B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP3104672A 1972-03-28 1972-03-28 Expired JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3104672A JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-28 1972-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3104672A JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-28 1972-03-28

Publications (2)

Publication Number Publication Date
JPS4898781A true JPS4898781A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-14
JPS5418110B2 JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05

Family

ID=12320525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3104672A Expired JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-28 1972-03-28

Country Status (1)

Country Link
JP (1) JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940077A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-18 1974-04-15
JPS6070729A (ja) * 1983-09-27 1985-04-22 Shin Etsu Chem Co Ltd 半導体装置
JPS61198634A (ja) * 1985-02-27 1986-09-03 Asahi Chem Ind Co Ltd 半導体装置の製造方法
JPS6399282A (ja) * 1986-10-16 1988-04-30 Hitachi Chem Co Ltd ポリイミド成形品の接合法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940077A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-18 1974-04-15
JPS6070729A (ja) * 1983-09-27 1985-04-22 Shin Etsu Chem Co Ltd 半導体装置
JPS61198634A (ja) * 1985-02-27 1986-09-03 Asahi Chem Ind Co Ltd 半導体装置の製造方法
JPS6399282A (ja) * 1986-10-16 1988-04-30 Hitachi Chem Co Ltd ポリイミド成形品の接合法

Also Published As

Publication number Publication date
JPS5418110B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05

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