JPS4897484A - - Google Patents

Info

Publication number
JPS4897484A
JPS4897484A JP2174072A JP2174072A JPS4897484A JP S4897484 A JPS4897484 A JP S4897484A JP 2174072 A JP2174072 A JP 2174072A JP 2174072 A JP2174072 A JP 2174072A JP S4897484 A JPS4897484 A JP S4897484A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2174072A
Other languages
Japanese (ja)
Other versions
JPS5226674B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2174072A priority Critical patent/JPS5226674B2/ja
Publication of JPS4897484A publication Critical patent/JPS4897484A/ja
Publication of JPS5226674B2 publication Critical patent/JPS5226674B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Dicing (AREA)
JP2174072A 1972-03-02 1972-03-02 Expired JPS5226674B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2174072A JPS5226674B2 (cg-RX-API-DMAC7.html) 1972-03-02 1972-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2174072A JPS5226674B2 (cg-RX-API-DMAC7.html) 1972-03-02 1972-03-02

Publications (2)

Publication Number Publication Date
JPS4897484A true JPS4897484A (cg-RX-API-DMAC7.html) 1973-12-12
JPS5226674B2 JPS5226674B2 (cg-RX-API-DMAC7.html) 1977-07-15

Family

ID=12063458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2174072A Expired JPS5226674B2 (cg-RX-API-DMAC7.html) 1972-03-02 1972-03-02

Country Status (1)

Country Link
JP (1) JPS5226674B2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817636A (ja) * 1981-07-23 1983-02-01 Nec Home Electronics Ltd 半導体装置の製造方法
WO2019082724A1 (ja) * 2017-10-27 2019-05-02 三星ダイヤモンド工業株式会社 メタル膜付き基板の分断方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817636A (ja) * 1981-07-23 1983-02-01 Nec Home Electronics Ltd 半導体装置の製造方法
WO2019082724A1 (ja) * 2017-10-27 2019-05-02 三星ダイヤモンド工業株式会社 メタル膜付き基板の分断方法
JPWO2019082724A1 (ja) * 2017-10-27 2020-11-12 三星ダイヤモンド工業株式会社 メタル膜付き基板の分断方法
JP2021193746A (ja) * 2017-10-27 2021-12-23 三星ダイヤモンド工業株式会社 メタル膜付き基板の分断方法
KR20220035995A (ko) * 2017-10-27 2022-03-22 미쓰보시 다이야몬도 고교 가부시키가이샤 메탈막 부착 기판의 분단 방법
KR20230022274A (ko) * 2017-10-27 2023-02-14 미쓰보시 다이야몬도 고교 가부시키가이샤 메탈막 부착 기판의 분단 방법

Also Published As

Publication number Publication date
JPS5226674B2 (cg-RX-API-DMAC7.html) 1977-07-15

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