JPS4896086A - - Google Patents
Info
- Publication number
- JPS4896086A JPS4896086A JP2915272A JP2915272A JPS4896086A JP S4896086 A JPS4896086 A JP S4896086A JP 2915272 A JP2915272 A JP 2915272A JP 2915272 A JP2915272 A JP 2915272A JP S4896086 A JPS4896086 A JP S4896086A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915272A JPS5120265B2 (https=) | 1972-03-23 | 1972-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915272A JPS5120265B2 (https=) | 1972-03-23 | 1972-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4896086A true JPS4896086A (https=) | 1973-12-08 |
| JPS5120265B2 JPS5120265B2 (https=) | 1976-06-23 |
Family
ID=12268271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2915272A Expired JPS5120265B2 (https=) | 1972-03-23 | 1972-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120265B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
| JPH0786390A (ja) * | 1993-06-24 | 1995-03-31 | Nec Corp | 半導体集積回路の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5316959U (https=) * | 1976-07-26 | 1978-02-13 | ||
| JPS53111964U (https=) * | 1977-02-15 | 1978-09-06 |
-
1972
- 1972-03-23 JP JP2915272A patent/JPS5120265B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
| JPH0786390A (ja) * | 1993-06-24 | 1995-03-31 | Nec Corp | 半導体集積回路の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5120265B2 (https=) | 1976-06-23 |