JPS5120265B2 - - Google Patents
Info
- Publication number
- JPS5120265B2 JPS5120265B2 JP2915272A JP2915272A JPS5120265B2 JP S5120265 B2 JPS5120265 B2 JP S5120265B2 JP 2915272 A JP2915272 A JP 2915272A JP 2915272 A JP2915272 A JP 2915272A JP S5120265 B2 JPS5120265 B2 JP S5120265B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2915272A JPS5120265B2 (ja) | 1972-03-23 | 1972-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2915272A JPS5120265B2 (ja) | 1972-03-23 | 1972-03-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4896086A JPS4896086A (ja) | 1973-12-08 |
JPS5120265B2 true JPS5120265B2 (ja) | 1976-06-23 |
Family
ID=12268271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2915272A Expired JPS5120265B2 (ja) | 1972-03-23 | 1972-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5120265B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5316959U (ja) * | 1976-07-26 | 1978-02-13 | ||
JPS53111964U (ja) * | 1977-02-15 | 1978-09-06 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
JPH0786390A (ja) * | 1993-06-24 | 1995-03-31 | Nec Corp | 半導体集積回路の製造方法 |
-
1972
- 1972-03-23 JP JP2915272A patent/JPS5120265B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5316959U (ja) * | 1976-07-26 | 1978-02-13 | ||
JPS53111964U (ja) * | 1977-02-15 | 1978-09-06 |
Also Published As
Publication number | Publication date |
---|---|
JPS4896086A (ja) | 1973-12-08 |