JPS5120265B2 - - Google Patents

Info

Publication number
JPS5120265B2
JPS5120265B2 JP2915272A JP2915272A JPS5120265B2 JP S5120265 B2 JPS5120265 B2 JP S5120265B2 JP 2915272 A JP2915272 A JP 2915272A JP 2915272 A JP2915272 A JP 2915272A JP S5120265 B2 JPS5120265 B2 JP S5120265B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2915272A
Other versions
JPS4896086A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2915272A priority Critical patent/JPS5120265B2/ja
Publication of JPS4896086A publication Critical patent/JPS4896086A/ja
Publication of JPS5120265B2 publication Critical patent/JPS5120265B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)
JP2915272A 1972-03-23 1972-03-23 Expired JPS5120265B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2915272A JPS5120265B2 (ja) 1972-03-23 1972-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2915272A JPS5120265B2 (ja) 1972-03-23 1972-03-23

Publications (2)

Publication Number Publication Date
JPS4896086A JPS4896086A (ja) 1973-12-08
JPS5120265B2 true JPS5120265B2 (ja) 1976-06-23

Family

ID=12268271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2915272A Expired JPS5120265B2 (ja) 1972-03-23 1972-03-23

Country Status (1)

Country Link
JP (1) JPS5120265B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316959U (ja) * 1976-07-26 1978-02-13
JPS53111964U (ja) * 1977-02-15 1978-09-06

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits
JPH0786390A (ja) * 1993-06-24 1995-03-31 Nec Corp 半導体集積回路の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316959U (ja) * 1976-07-26 1978-02-13
JPS53111964U (ja) * 1977-02-15 1978-09-06

Also Published As

Publication number Publication date
JPS4896086A (ja) 1973-12-08

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