JPS4896086A - - Google Patents

Info

Publication number
JPS4896086A
JPS4896086A JP2915272A JP2915272A JPS4896086A JP S4896086 A JPS4896086 A JP S4896086A JP 2915272 A JP2915272 A JP 2915272A JP 2915272 A JP2915272 A JP 2915272A JP S4896086 A JPS4896086 A JP S4896086A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2915272A
Other languages
Japanese (ja)
Other versions
JPS5120265B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2915272A priority Critical patent/JPS5120265B2/ja
Publication of JPS4896086A publication Critical patent/JPS4896086A/ja
Publication of JPS5120265B2 publication Critical patent/JPS5120265B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Element Separation (AREA)
JP2915272A 1972-03-23 1972-03-23 Expired JPS5120265B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2915272A JPS5120265B2 (enrdf_load_stackoverflow) 1972-03-23 1972-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2915272A JPS5120265B2 (enrdf_load_stackoverflow) 1972-03-23 1972-03-23

Publications (2)

Publication Number Publication Date
JPS4896086A true JPS4896086A (enrdf_load_stackoverflow) 1973-12-08
JPS5120265B2 JPS5120265B2 (enrdf_load_stackoverflow) 1976-06-23

Family

ID=12268271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2915272A Expired JPS5120265B2 (enrdf_load_stackoverflow) 1972-03-23 1972-03-23

Country Status (1)

Country Link
JP (1) JPS5120265B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits
JPH0786390A (ja) * 1993-06-24 1995-03-31 Nec Corp 半導体集積回路の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316959U (enrdf_load_stackoverflow) * 1976-07-26 1978-02-13
JPS53111964U (enrdf_load_stackoverflow) * 1977-02-15 1978-09-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits
JPH0786390A (ja) * 1993-06-24 1995-03-31 Nec Corp 半導体集積回路の製造方法

Also Published As

Publication number Publication date
JPS5120265B2 (enrdf_load_stackoverflow) 1976-06-23

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