JPS4895638A - - Google Patents
Info
- Publication number
- JPS4895638A JPS4895638A JP2748172A JP2748172A JPS4895638A JP S4895638 A JPS4895638 A JP S4895638A JP 2748172 A JP2748172 A JP 2748172A JP 2748172 A JP2748172 A JP 2748172A JP S4895638 A JPS4895638 A JP S4895638A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Constitution Of High-Frequency Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2748172A JPS4895638A (ja) | 1972-03-21 | 1972-03-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2748172A JPS4895638A (ja) | 1972-03-21 | 1972-03-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4895638A true JPS4895638A (ja) | 1973-12-07 |
Family
ID=12222299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2748172A Pending JPS4895638A (ja) | 1972-03-21 | 1972-03-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4895638A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735319A (en) * | 1980-08-13 | 1982-02-25 | Hitachi Ltd | Heat treatment device |
| JPS58135643U (ja) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | 太陽熱温水器の給水器構造 |
| JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
| JPH02106758A (ja) * | 1988-10-14 | 1990-04-18 | Matsushita Electric Ind Co Ltd | パターン形成方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4110542Y1 (ja) * | 1964-06-20 | 1966-05-18 |
-
1972
- 1972-03-21 JP JP2748172A patent/JPS4895638A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4110542Y1 (ja) * | 1964-06-20 | 1966-05-18 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735319A (en) * | 1980-08-13 | 1982-02-25 | Hitachi Ltd | Heat treatment device |
| JPH0313735B2 (ja) * | 1980-08-13 | 1991-02-25 | Hitachi Ltd | |
| JPS58135643U (ja) * | 1982-03-05 | 1983-09-12 | 松下電工株式会社 | 太陽熱温水器の給水器構造 |
| JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
| JPH0424855B2 (ja) * | 1988-05-20 | 1992-04-28 | Hitachi Ltd | |
| JPH02106758A (ja) * | 1988-10-14 | 1990-04-18 | Matsushita Electric Ind Co Ltd | パターン形成方法 |