JPS4895179A - - Google Patents
Info
- Publication number
- JPS4895179A JPS4895179A JP2719072A JP2719072A JPS4895179A JP S4895179 A JPS4895179 A JP S4895179A JP 2719072 A JP2719072 A JP 2719072A JP 2719072 A JP2719072 A JP 2719072A JP S4895179 A JPS4895179 A JP S4895179A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2719072A JPS5411115B2 (en:Method) | 1972-03-16 | 1972-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2719072A JPS5411115B2 (en:Method) | 1972-03-16 | 1972-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4895179A true JPS4895179A (en:Method) | 1973-12-06 |
| JPS5411115B2 JPS5411115B2 (en:Method) | 1979-05-11 |
Family
ID=12214146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2719072A Expired JPS5411115B2 (en:Method) | 1972-03-16 | 1972-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5411115B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57125530U (en:Method) * | 1981-01-29 | 1982-08-05 | ||
| JPS6015919A (ja) * | 1983-07-07 | 1985-01-26 | Rohm Co Ltd | 半導体素子の製造方法 |
| JP2018206976A (ja) * | 2017-06-05 | 2018-12-27 | 東京エレクトロン株式会社 | ボロン膜の除去方法およびボロン膜によるパターン形成方法 |
-
1972
- 1972-03-16 JP JP2719072A patent/JPS5411115B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57125530U (en:Method) * | 1981-01-29 | 1982-08-05 | ||
| JPS6015919A (ja) * | 1983-07-07 | 1985-01-26 | Rohm Co Ltd | 半導体素子の製造方法 |
| JP2018206976A (ja) * | 2017-06-05 | 2018-12-27 | 東京エレクトロン株式会社 | ボロン膜の除去方法およびボロン膜によるパターン形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5411115B2 (en:Method) | 1979-05-11 |