JPS4894289U - - Google Patents
Info
- Publication number
- JPS4894289U JPS4894289U JP1972017836U JP1783672U JPS4894289U JP S4894289 U JPS4894289 U JP S4894289U JP 1972017836 U JP1972017836 U JP 1972017836U JP 1783672 U JP1783672 U JP 1783672U JP S4894289 U JPS4894289 U JP S4894289U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972017836U JPS4894289U (enExample) | 1972-02-12 | 1972-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972017836U JPS4894289U (enExample) | 1972-02-12 | 1972-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4894289U true JPS4894289U (enExample) | 1973-11-10 |
Family
ID=27869219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1972017836U Pending JPS4894289U (enExample) | 1972-02-12 | 1972-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4894289U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190867A (ja) * | 1984-10-05 | 1986-05-09 | Naoetsu Denshi Kogyo Kk | ウェーハの研磨方法 |
| JPH02218550A (ja) * | 1989-02-17 | 1990-08-31 | Speedfam Co Ltd | 両面研磨装置における上定盤支持装置 |
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1972
- 1972-02-12 JP JP1972017836U patent/JPS4894289U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190867A (ja) * | 1984-10-05 | 1986-05-09 | Naoetsu Denshi Kogyo Kk | ウェーハの研磨方法 |
| JPH02218550A (ja) * | 1989-02-17 | 1990-08-31 | Speedfam Co Ltd | 両面研磨装置における上定盤支持装置 |