JPS4892246A - - Google Patents
Info
- Publication number
- JPS4892246A JPS4892246A JP1882673A JP1882673A JPS4892246A JP S4892246 A JPS4892246 A JP S4892246A JP 1882673 A JP1882673 A JP 1882673A JP 1882673 A JP1882673 A JP 1882673A JP S4892246 A JPS4892246 A JP S4892246A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB697672A GB1426865A (en) | 1972-02-15 | 1972-02-15 | Carousel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4892246A true JPS4892246A (en) | 1973-11-30 |
Family
ID=9824282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1882673A Pending JPS4892246A (en) | 1972-02-15 | 1973-02-15 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4892246A (en) |
| AU (1) | AU6103573A (en) |
| DE (1) | DE2306827A1 (en) |
| FR (1) | FR2172216B3 (en) |
| GB (1) | GB1426865A (en) |
| IT (1) | IT979134B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK135257B (en) * | 1975-07-09 | 1977-03-21 | Danfysik As | Apparatus for ion implantation in workpieces, in particular slices of semiconductor material. |
| DE102008061245B3 (en) * | 2008-12-10 | 2010-01-28 | Wega-Konstruktion GbR (vertretungsberechtigte Gesellschafter: Matthias Seuß und Steffen Hänsel, 09125 Chemnitz) | Rotary indexing machine for electron beam processing of workpieces, comprises an intermittent, rotatory workpiece table, and workpiece chambers for receiving the workpiece with a loading opening |
| DE102011120157B4 (en) * | 2011-12-06 | 2017-08-31 | Evobeam GmbH | Vacuum processing apparatus |
-
1972
- 1972-02-15 GB GB697672A patent/GB1426865A/en not_active Expired
-
1973
- 1973-02-12 DE DE19732306827 patent/DE2306827A1/en active Pending
- 1973-02-14 FR FR7305173A patent/FR2172216B3/fr not_active Expired
- 1973-02-15 JP JP1882673A patent/JPS4892246A/ja active Pending
- 1973-02-15 IT IT2042273A patent/IT979134B/en active
- 1973-10-04 AU AU61035/73A patent/AU6103573A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| AU6103573A (en) | 1975-04-10 |
| DE2306827A1 (en) | 1973-08-23 |
| FR2172216A1 (en) | 1973-09-28 |
| IT979134B (en) | 1974-09-30 |
| GB1426865A (en) | 1976-03-03 |
| FR2172216B3 (en) | 1976-02-13 |