JPS4892231A - - Google Patents
Info
- Publication number
- JPS4892231A JPS4892231A JP2371372A JP2371372A JPS4892231A JP S4892231 A JPS4892231 A JP S4892231A JP 2371372 A JP2371372 A JP 2371372A JP 2371372 A JP2371372 A JP 2371372A JP S4892231 A JPS4892231 A JP S4892231A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2371372A JPS5216049B2 (en:Method) | 1972-03-08 | 1972-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2371372A JPS5216049B2 (en:Method) | 1972-03-08 | 1972-03-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4892231A true JPS4892231A (en:Method) | 1973-11-30 |
| JPS5216049B2 JPS5216049B2 (en:Method) | 1977-05-06 |
Family
ID=12117966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2371372A Expired JPS5216049B2 (en:Method) | 1972-03-08 | 1972-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5216049B2 (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5195939A (en:Method) * | 1975-01-14 | 1976-08-23 | ||
| JP2010215934A (ja) * | 2009-03-13 | 2010-09-30 | Dowa Metaltech Kk | 銅合金材の酸化スケールの除去方法 |
| JP2013076119A (ja) * | 2011-09-30 | 2013-04-25 | Advanced Technology Materials Inc | 銅または銅合金用エッチング液 |
| JP2016135928A (ja) * | 2016-05-06 | 2016-07-28 | アドバンスド テクノロジー マテリアルズ，インコーポレイテッド | 銅または銅合金用エッチング液 |
-
1972
- 1972-03-08 JP JP2371372A patent/JPS5216049B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5195939A (en:Method) * | 1975-01-14 | 1976-08-23 | ||
| JP2010215934A (ja) * | 2009-03-13 | 2010-09-30 | Dowa Metaltech Kk | 銅合金材の酸化スケールの除去方法 |
| JP2013076119A (ja) * | 2011-09-30 | 2013-04-25 | Advanced Technology Materials Inc | 銅または銅合金用エッチング液 |
| US9175404B2 (en) | 2011-09-30 | 2015-11-03 | Advanced Technology Materials, Inc. | Etching agent for copper or copper alloy |
| TWI565835B (zh) * | 2011-09-30 | 2017-01-11 | 美商恩特葛瑞斯股份有限公司 | 銅或銅合金用蝕刻液及使用其之電子基板製造方法 |
| KR20190080962A (ko) * | 2011-09-30 | 2019-07-08 | 엔테그리스, 아이엔씨. | 구리 또는 구리 합금용 에칭액 |
| JP2016135928A (ja) * | 2016-05-06 | 2016-07-28 | アドバンスド テクノロジー マテリアルズ，インコーポレイテッド | 銅または銅合金用エッチング液 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5216049B2 (en:Method) | 1977-05-06 |