JPS4892231A - - Google Patents

Info

Publication number
JPS4892231A
JPS4892231A JP2371372A JP2371372A JPS4892231A JP S4892231 A JPS4892231 A JP S4892231A JP 2371372 A JP2371372 A JP 2371372A JP 2371372 A JP2371372 A JP 2371372A JP S4892231 A JPS4892231 A JP S4892231A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2371372A
Other languages
Japanese (ja)
Other versions
JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2371372A priority Critical patent/JPS5216049B2/ja
Publication of JPS4892231A publication Critical patent/JPS4892231A/ja
Publication of JPS5216049B2 publication Critical patent/JPS5216049B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)
JP2371372A 1972-03-08 1972-03-08 Expired JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2371372A JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-08 1972-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2371372A JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-08 1972-03-08

Publications (2)

Publication Number Publication Date
JPS4892231A true JPS4892231A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-30
JPS5216049B2 JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-06

Family

ID=12117966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2371372A Expired JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-03-08 1972-03-08

Country Status (1)

Country Link
JP (1) JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5195939A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-01-14 1976-08-23
JP2010215934A (ja) * 2009-03-13 2010-09-30 Dowa Metaltech Kk 銅合金材の酸化スケールの除去方法
JP2013076119A (ja) * 2011-09-30 2013-04-25 Advanced Technology Materials Inc 銅または銅合金用エッチング液
JP2016135928A (ja) * 2016-05-06 2016-07-28 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド 銅または銅合金用エッチング液

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5195939A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-01-14 1976-08-23
JP2010215934A (ja) * 2009-03-13 2010-09-30 Dowa Metaltech Kk 銅合金材の酸化スケールの除去方法
JP2013076119A (ja) * 2011-09-30 2013-04-25 Advanced Technology Materials Inc 銅または銅合金用エッチング液
US9175404B2 (en) 2011-09-30 2015-11-03 Advanced Technology Materials, Inc. Etching agent for copper or copper alloy
TWI565835B (zh) * 2011-09-30 2017-01-11 美商恩特葛瑞斯股份有限公司 銅或銅合金用蝕刻液及使用其之電子基板製造方法
KR20190080962A (ko) * 2011-09-30 2019-07-08 엔테그리스, 아이엔씨. 구리 또는 구리 합금용 에칭액
JP2016135928A (ja) * 2016-05-06 2016-07-28 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド 銅または銅合金用エッチング液

Also Published As

Publication number Publication date
JPS5216049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-06

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