JPS4890547A - - Google Patents
Info
- Publication number
- JPS4890547A JPS4890547A JP47021802A JP2180272A JPS4890547A JP S4890547 A JPS4890547 A JP S4890547A JP 47021802 A JP47021802 A JP 47021802A JP 2180272 A JP2180272 A JP 2180272A JP S4890547 A JPS4890547 A JP S4890547A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2180272A JPS5536929B2 (https=) | 1972-03-02 | 1972-03-02 | |
| US00252020A US3739247A (en) | 1971-05-17 | 1972-05-10 | Positioning device using photoelectric scanning |
| NL7206653A NL7206653A (https=) | 1971-05-17 | 1972-05-17 | |
| GB2324672A GB1396691A (en) | 1971-05-17 | 1972-05-17 | Positioning device using photoelectric scanning |
| DE2224083A DE2224083C3 (de) | 1971-05-17 | 1972-05-17 | Photoelektrische Positioniereinrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2180272A JPS5536929B2 (https=) | 1972-03-02 | 1972-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4890547A true JPS4890547A (https=) | 1973-11-26 |
| JPS5536929B2 JPS5536929B2 (https=) | 1980-09-25 |
Family
ID=12065175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2180272A Expired JPS5536929B2 (https=) | 1971-05-17 | 1972-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5536929B2 (https=) |
-
1972
- 1972-03-02 JP JP2180272A patent/JPS5536929B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5536929B2 (https=) | 1980-09-25 |