JPS4886568A - - Google Patents

Info

Publication number
JPS4886568A
JPS4886568A JP1709672A JP1709672A JPS4886568A JP S4886568 A JPS4886568 A JP S4886568A JP 1709672 A JP1709672 A JP 1709672A JP 1709672 A JP1709672 A JP 1709672A JP S4886568 A JPS4886568 A JP S4886568A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1709672A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1709672A priority Critical patent/JPS4886568A/ja
Publication of JPS4886568A publication Critical patent/JPS4886568A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP1709672A 1972-02-18 1972-02-18 Pending JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1709672A JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1709672A JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Publications (1)

Publication Number Publication Date
JPS4886568A true JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-15

Family

ID=11934457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1709672A Pending JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-02-18 1972-02-18

Country Status (1)

Country Link
JP (1) JPS4886568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010011134A (ja) * 2008-06-27 2010-01-14 Seiko Instruments Inc 共振周波数可変mems振動子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010011134A (ja) * 2008-06-27 2010-01-14 Seiko Instruments Inc 共振周波数可変mems振動子

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