JPS4884857U - - Google Patents
Info
- Publication number
- JPS4884857U JPS4884857U JP783272U JP783272U JPS4884857U JP S4884857 U JPS4884857 U JP S4884857U JP 783272 U JP783272 U JP 783272U JP 783272 U JP783272 U JP 783272U JP S4884857 U JPS4884857 U JP S4884857U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP783272U JPS4884857U (ja) | 1972-01-14 | 1972-01-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP783272U JPS4884857U (ja) | 1972-01-14 | 1972-01-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4884857U true JPS4884857U (ja) | 1973-10-15 |
Family
ID=27850659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP783272U Pending JPS4884857U (ja) | 1972-01-14 | 1972-01-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4884857U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013243317A (ja) * | 2012-05-22 | 2013-12-05 | Tokyo Ohka Kogyo Co Ltd | 塗布装置、基板処理システムおよび基板処理方法 |
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1972
- 1972-01-14 JP JP783272U patent/JPS4884857U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013243317A (ja) * | 2012-05-22 | 2013-12-05 | Tokyo Ohka Kogyo Co Ltd | 塗布装置、基板処理システムおよび基板処理方法 |