JPS4879736A - - Google Patents

Info

Publication number
JPS4879736A
JPS4879736A JP978872A JP978872A JPS4879736A JP S4879736 A JPS4879736 A JP S4879736A JP 978872 A JP978872 A JP 978872A JP 978872 A JP978872 A JP 978872A JP S4879736 A JPS4879736 A JP S4879736A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP978872A
Other languages
Japanese (ja)
Other versions
JPS5120170B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47009788A priority Critical patent/JPS5120170B2/ja
Publication of JPS4879736A publication Critical patent/JPS4879736A/ja
Publication of JPS5120170B2 publication Critical patent/JPS5120170B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47009788A 1972-01-27 1972-01-27 Expired JPS5120170B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (en) 1972-01-27 1972-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47009788A JPS5120170B2 (en) 1972-01-27 1972-01-27

Publications (2)

Publication Number Publication Date
JPS4879736A true JPS4879736A (en) 1973-10-25
JPS5120170B2 JPS5120170B2 (en) 1976-06-23

Family

ID=11729947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47009788A Expired JPS5120170B2 (en) 1972-01-27 1972-01-27

Country Status (1)

Country Link
JP (1) JPS5120170B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159477A (en) * 1974-06-14 1975-12-24
JPS5127825A (en) * 1974-09-02 1976-03-09 Ulvac Corp HIMAKUKEISEISOCHI
JPS5127826A (en) * 1974-09-02 1976-03-09 Ulvac Corp HIMAKUKEISEISOCHI
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159477A (en) * 1974-06-14 1975-12-24
JPS5127825A (en) * 1974-09-02 1976-03-09 Ulvac Corp HIMAKUKEISEISOCHI
JPS5127826A (en) * 1974-09-02 1976-03-09 Ulvac Corp HIMAKUKEISEISOCHI
JPS5318330B2 (en) * 1974-09-02 1978-06-14
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus
JPS5521109B2 (en) * 1975-10-29 1980-06-07

Also Published As

Publication number Publication date
JPS5120170B2 (en) 1976-06-23

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