JPS4879579A - - Google Patents
Info
- Publication number
- JPS4879579A JPS4879579A JP960972A JP960972A JPS4879579A JP S4879579 A JPS4879579 A JP S4879579A JP 960972 A JP960972 A JP 960972A JP 960972 A JP960972 A JP 960972A JP S4879579 A JPS4879579 A JP S4879579A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP960972A JPS4879579A (en:Method) | 1972-01-25 | 1972-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP960972A JPS4879579A (en:Method) | 1972-01-25 | 1972-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4879579A true JPS4879579A (en:Method) | 1973-10-25 |
Family
ID=11725026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP960972A Pending JPS4879579A (en:Method) | 1972-01-25 | 1972-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4879579A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52124879A (en) * | 1976-04-14 | 1977-10-20 | Oki Electric Ind Co Ltd | Production of semiconductor integrated circuit |
-
1972
- 1972-01-25 JP JP960972A patent/JPS4879579A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52124879A (en) * | 1976-04-14 | 1977-10-20 | Oki Electric Ind Co Ltd | Production of semiconductor integrated circuit |