JPS4878873A - - Google Patents
Info
- Publication number
- JPS4878873A JPS4878873A JP787172A JP787172A JPS4878873A JP S4878873 A JPS4878873 A JP S4878873A JP 787172 A JP787172 A JP 787172A JP 787172 A JP787172 A JP 787172A JP S4878873 A JPS4878873 A JP S4878873A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787172A JPS5132498B2 (ja) | 1972-01-20 | 1972-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787172A JPS5132498B2 (ja) | 1972-01-20 | 1972-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4878873A true JPS4878873A (ja) | 1973-10-23 |
| JPS5132498B2 JPS5132498B2 (ja) | 1976-09-13 |
Family
ID=11677681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP787172A Expired JPS5132498B2 (ja) | 1972-01-20 | 1972-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132498B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177915A (ja) * | 1986-01-30 | 1987-08-04 | Nec Corp | 半導体装置の製造方法 |
-
1972
- 1972-01-20 JP JP787172A patent/JPS5132498B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177915A (ja) * | 1986-01-30 | 1987-08-04 | Nec Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5132498B2 (ja) | 1976-09-13 |